planargrow MoS2 CVD systems
The planarGROW series of thermal CVD systems for MoS2 (and other metal dichalcogenides) is a horizontal hot-wall reactor system. Unlike graphene, MoS2 is grown from solid sources (typically sulpher powder and MoO3 powder) and can be directly deposited onto a target substrate such as SiO2. planarTECH offers a standard 2" system (planarGROW-2S-MoS2), whose detailed specs are shown below. However, this standard system can be customized to the user's specific application requirements.
planarGROW-2S-MoS2 PRODUCT SPEC
QUARTZ TUBE & FURNACE
• Quartz Tube Dimensions: ф50(OD)*1000mm • Water Jacket Vacuum Plugs with Viton O-rings • Heating Element: Kanthal Wire, Glass Wool Molding • Maximum Temp: 1,000°C, K-type Thermocouple • Heating Zone: 2-zones, ф50*300mm Each • Alumina Tray + Wafer Tray for 10x10mm2 Samples GAS SUPPLY UNIT • One (1) Celerity TN2900 Mass Flow Controller o Argon (Ar): 1,000sccm • Open Mounting Bay for Second (2nd) MFC • ¼” Stainless Steel Tubing • Two (2) ¼” Pneumatic-Type Diaphragm Valves VACUUM & PRESSURE CONTROL UNIT • Atovac CG201 Convection Gauge • Atovac CG2000 Vacuum Gauge & Controller • GPC3000 Pressure & Flow Controller • Alcatel Dry Pump (400 liter/m) w/ Cold Trap SYSTEM CONTROL UNIT • MS Windows XP Pro Embedded PC o Intel 3.0Ghz Core2Duo, 2GB Memory • PLC Module with National Inst. LabVIEW Interface • Samsung E1920R 19” LCD Monitor SAFETY & COOLING • Water Cooled End Flanges • Buzzer Alarm & System Error Display • Interlock System DIMENSIONS & UTILITY REQUIREMENTS • Footprint: 1.5m (W) x 1.50m (H) x 0.80m (D) • Weight: ~200kg • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A • Air: 4-5kgf/cm2, ¼” tube • Water: 2-3kgf/cm2, ½” tube |
planarGROW-2B-MoS2 with Touch Screen at SKKU
Fully Automated PC Control with LabVIEW Front End
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planargrow-2S-MoS2 software Interface
One of the key benefits of the planarGROW product line is its ease of use via a fully functional Graphical User Interface (GUI) built around National Instruments LabVIEW software. This GUI allows full control of each system parameter, allows the user to load and save custom growth recipes, and enables “1-click” unattended operation via an auto process feature. The images below are screenshots of the GUI for a planarGROW-2S graphene CVD system with a high-temperature furnace and a turbopump. (Click images to enlarge.)
standard warranty
Each planarGROW system is delivered with a standard warranty that covers all parts – excluding quartzware and O-rings – for one (1) year from the date of installation at the customer site. Any defects in materials or workmanship during the warranty period will remedied by repair or replacement free of charge.
on-site setup & training
After delivery, planarTECH or its local representative/distributor will send a technical team to the customer site to perform proper installation of the planarGROW system, verification of its operation and a quality check. This installation process typically takes one to two days to complete. Prior to on-site setup, the customer must complete necessary preparations, such as providing the proper electrical, water and gas hookups. planarTECH will provide the customer with a complete checklist after receiving an order. After successful setup of the planarGROW system, planarTECH or its local representative/distributor will provide on-site training in the operation and use of the system.
shipping policy
planarTECH ships each planarGROW system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea. The cost of shipping is included in the base price.