planargrow h-BN CVD systems
The planarGROW series of thermal CVD systems for h-BN is a horizontal hot-wall reactor system. planarTECH offers a standard 2" system (planarGROW-2S-BN), whose detailed specs are shown below. However, this standard system can be customized to the user's specific application requirements. h-BN can be grown from either liquid borazine or solid ammonia borane, and this system supports both precursors. In addition, the system supports dual process use for both h-BN and graphene.
planarGROW-2S-BN PRODUCT SPEC
QUARTZ TUBE & FURNACE
• Tube Dimensions: ф50*1000mm • Furnace Body (WxHxD): 500x500x650L • Heater: Kanthal Wire w/ Glass Wool Molding • Maximum Temperature: 1,100°C • Thermocouple: K type, ID 6.5 mm • Heating Zone: 1-zone, ф100*350mm • Linear Motion Control Unit • Manual Furnace Door GAS SUPPLY UNIT • Four (4) Celerity TN2900 Mass Flow Controllers o Hydrogen (H2), 100sccm o Methane (CH4), 200sccm [For Graphene] o Argon (Ar): 1,000sccm o Nitrogen (N2): 1,000sccm • Open Mounting Bay for Fifth (5th) MFC • ¼” 316L Stainless Steel Tubing/Fittings • Five (5) ¼” Pneumatic-Type Diaphragm Valves • Source Vapor Feeding System w/ Heating Jacket • Low Temp. Chiller (-10°C) for Borazine Canister VACUUM & PRESSURE CONTROL UNIT • Varian Dry Pump (110 liter/min) • KF25 2-step Pneumatic Roughing Valve • ¼” Manual Vent Valve • ¼” Metering Bypass Valve SYSTEM CONTROL UNIT • MS Windows XP Pro Embedded PC o Intel 3.0Ghz Core2Duo, 2GB Memory • PLC Module with National Inst. LabVIEW Interface • Samsung E1920R 19” LCD Monitor SAFETY & COOLING • Water Cooled End Flanges w/ Viewport • SU304 50mm ID Vacuum Plugs • Aluminum Seal Bushes w/ Kalrez O-Rings • Cold Trap With Liquid Nitrogen Basket • Buzzer Alarm & System Error Display • Interlock System DIMENSIONS & UTILITY REQUIREMENTS • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D) • Weight: ~200kg • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A • Air: 4-5kgf/cm2, ¼” tube • Water: 2-3kgf/cm2, ½” tube |
planarGROW-1B-BN with at Dongguk University
Fully Automated PC Control with LabVIEW Front End
Low-temperature Chiller for Borazine Canister
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planargrow-2S-BN software Interface
One of the key benefits of the planarGROW product line is its ease of use via a fully functional Graphical User Interface (GUI) built around National Instruments LabVIEW software. This GUI allows full control of each system parameter, allows the user to load and save custom growth recipes, and enables “1-click” unattended operation via an auto process feature. The images below are screenshots of the GUI for a planarGROW-2S system with a high-temperature furnace and a turbopump. (Click images to enlarge.)
Boron nitride synthesis references
With a solid understanding of the synthesis of monolayer graphene, many researchers have pursued the synthesis of other 2D materials, such as boron nitride. As with graphene, planarTECH has a track record of providing systems for this new field of study. The boron nitride synthesis functionality of the planarGROW-2S-BN is based on a design by Prof. Ki Kang Kim, now an assistant professor at DongGuk University in Seoul, Korea. Below is a selection of four (4) of his recently published papers in which a planarGROW (or similar) system was used to synthesize the BN used in the work.
References (Growth on Copper)
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Installation Sites: The planarGROW-2S-BN (or similar system) has an instal base in Korea and is currently being used for h-BN synthesis by the following institutions.
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standard warranty
Each planarGROW system is delivered with a standard warranty that covers all parts – excluding quartzware and O-rings – for one (1) year from the date of installation at the customer site. Any defects in materials or workmanship during the warranty period will remedied by repair or replacement free of charge.
on-site setup & training
After delivery, planarTECH or its local representative/distributor will send a technical team to the customer site to perform proper installation of the planarGROW system, verification of its operation and a quality check. This installation process typically takes one to two days to complete. Prior to on-site setup, the customer must complete necessary preparations, such as providing the proper electrical, water and gas hookups. planarTECH will provide the customer with a complete checklist after receiving an order. After successful setup of the planarGROW system, planarTECH or its local representative/distributor will provide on-site training in the operation and use of the system.
shipping policy
planarTECH ships each planarGROW system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea. The cost of shipping is included in the base price.