planarTECH offers 3 standard CVD systems as shown in the product matrix below. - planarGROW-2B is a very economical and basic starter system for researchers with budget constraints;
- planarGROW-4S is our standard 4" tube system with some flexibility and upgrade capability;
- planarGROW-6E is our enhanced system with a 6" tube, 3-zone furnace with maximum temperature of 1,450C and an RF ICP module for plasma enhanced CVD. This is our most flexible and highest performance system;
Extra options such as a turbo pump and safety cover are also available. We can also customize systems to the customer's specification. Please contact us if you have special system requirements. | 