PLANARRIE Reactive Ion Etching System
planarRIE is an anisotropic plasma etching system that is designed to deliver optimum performance at low cost with high degree of process repeatability. It can handle wafers up to the size of 100mm (or 4 inches) in diameter. Depending on how it is configured, the system can be used for etching of oxides, nitrides, polymers, silicon, and III-V compounds. The system can accommodate a wide range of process gases. Standard are 3 mass flow controllers for precise control of gas flow rates with 1 more slot available for future expansion.
planarRIE-4B product specification
CHAMBER UNIT
• Chamber Body: SUS304 • Chamber Size: 270mm (OD) x 85mm (H) • 60(OD)mm Electrode Port & KF25 Pumping Port • 200(OD)mm Shoer Head Port and ¼” Gas Feeding Port • ¼” Vent Port & 500(OD)mm View Port • Anodized Aluminum Door – Manually Operated SUBSTRATE UNIT • Max. Wafer Size: 4-inch Wafer • 300W, 13.56MHz RF Generator with Auto Matching Network • SUS-based Anodized Aluminum Covered Electrode • Water-cooled, 6(OD)mm Flexible Hose • Plasma Shield Assembly & Teflon Insulator GAS SHOWERHEAD UNIT • SUS316 Door Embedded Type • ¼” Gas Feeding Port & 2(OD)mm Gas Feeding Hole • ¼” Purge Port for Venting Chamber VACUUM & PUMPING UNIT • 150 l/min Rotary Pump • CG202-N Vacuum Sensor • Flexible Exhaust Bellow • Optional: Automatic Pressure Control w/ Motorized Throttle Valve, Baratron Gauge & Controller • Optional: Dry Pump, Turbo-molecular Pump GAS SUPPLY UNIT • Three (3) Mass Flow Controllers o Argon (Ar) o Tetrafluoromethane (CF4) o Oxygen (O2) • One Open Mounting Bay for Additional MFC • ¼” Pneumatic Gas Valves • 4 Channel, GMC1200, MFC Controller ELECTRICAL CONTROL UNIT • PLC-based Control with 8.4” Touch-screen Display • Optional: Fully-automated PC Control o MS Windows 7 Pro Embedded PC o Intel Core2Duo E5700 3.0G o National Inst. LabVIEW User Front End o Samsung 19” LCD Monitor o Recipe Open/Save Function & Auto Process Mode • Safety Controls: Water and Air with Pressure Switch • Pneumatic Valve Control SYSTEM SIZE & UTILITY REQUIREMENT • Weight: approx. 150kg • System Dimensions: 700(W)x700(D)x600(H)mm • Power: 220V, Single-phase, 50A • Clean Dry Air: 5kgf/cm2, 6(OD)mm Connector • Water: 2-3kgf/cm2, 3/8” SUS 304 Pipe |
KEY BENEFITS
• Self-contained benchtop unit requiring minimal space • 13.56 MHz 300W RF generator with automatic matching network delivering excellent repeatability • 8.4-inch touchscreen for ease of operation • Automatic pressure control with throttle valve available • Multiple choices of etching processes: o Chemical etching (isotropic, fast rate) o Reactive ion etching (anisotropic, medium rate) o Physical etching (anisotropic, slow rate) Example of a Customized planarRIE-4C Full-sized System for Si and Polymer Etching
(Installed at IIT-Kanpur, India) Example of Process Results
(Polymer Etching with a planarRIE) |
references
The planarRIE product line has a wide install base in Korea. The reference sites using the same or similar etching systems for polymers, dielectric and semiconductor materials include: Samsung, SKKU, Korea University, Inha University, and many others.
standard warranty
Each planarRIE system is delivered with a standard warranty that covers all parts for one (1) year from the date of delivery to the customer site. Any defects in materials or workmanship during the warranty period will be remedied by repair or replacement free of charge.
on-site setup & training
After delivery, planarTECH or its local representative/distributor will send a technical team to the customer site to perform proper installation of the planarRIE system, verification of its operation and a quality check. This installation process typically takes one to two days to complete. After successful setup of the planarRIE system, planarTECH or its local representative/distributor will provide on-site training in the operation and use of the system.
shipping policy
planarTECH ships each planarRIE system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea. The cost of shipping is included in the base price. Typical lead time is 10-14 weeks after receipt of order.